Clark School Home UMD

ISR News Story

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910


Congratulations to Associate Professor Ray Adomaitis (ChE/ISR), Professor and former ISR Director Gary W. Rubloff (MSE/ISR), and former ISR-affiliated faculty member John Kidder. On Nov. 23 they received U.S. Patent 6,821,910 for "Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation."

This is a multizone, segmented showerhead for use in chemical vapor deposition, in plasma deposition and etching and other processes. It provides a gas impingement flux distribution controllable in two lateral dimensions to achieve programmable uniformity in recirculation (pumping) of exhaust gases back through the showerhead. It reduces intersegment mixing to achieve a high degree of spatial control of the process. The showerhead is useful for process tuning and optimization in manufacturing or for rapid materials and process discovery and optimization in research and development. | ISR patents page |

—December 2004

December 7, 2004


Prev   Next

 

 

Current Headlines

Relive Totality With Clark School Images, Videos

Researchers part of two NSF Neural & Cognitive Systems grants worth more than $1.2 million

ISR researchers win additional $948K NSF Neural and Cognitive Systems grant

Schonfeld, Ryzhov team up for NSF EAGER grant

Yu Named ASME Fellow

Khaligh-led student team wins award at IEEE IFEC competition

Former postdoc Eirini Tsiropoulou named to IEEE ComSoc "rising stars" list

TEDCO Invests $1M into Innovative Companies Including Rajeev Barua’s Startup SecondWrite LLC

Banis wins poster design award at Global Grand Challenges Summit

ISR faculty leading bio-inspired robotics and transportation electrification REUs

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar