Clark School Home UMD

ISR News Story

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910


Congratulations to Associate Professor Ray Adomaitis (ChE/ISR), Professor and former ISR Director Gary W. Rubloff (MSE/ISR), and former ISR-affiliated faculty member John Kidder. On Nov. 23 they received U.S. Patent 6,821,910 for "Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation."

This is a multizone, segmented showerhead for use in chemical vapor deposition, in plasma deposition and etching and other processes. It provides a gas impingement flux distribution controllable in two lateral dimensions to achieve programmable uniformity in recirculation (pumping) of exhaust gases back through the showerhead. It reduces intersegment mixing to achieve a high degree of spatial control of the process. The showerhead is useful for process tuning and optimization in manufacturing or for rapid materials and process discovery and optimization in research and development. | ISR patents page |

—December 2004

December 7, 2004


Prev   Next

 

 

Current Headlines

Ephremides is PI for new ONR 'age of information' grant

UMD Hosts Third Technica with over 800 Students from Around the Country

Srivastava Named Clark School Inaugural Associate Dean for Graduate Affairs

Pamela Abshire elected IEEE Fellow

Shihab Shamma elected IEEE Fellow

Wu Named AAAS Fellow

Baras, Kenyon, Hughes Network Systems win MIPS Global Impact Award

New microsystems detect, treat bacterial biofilms that cause post-operative infections

Srivastava named Clark School Dean for Graduate Affairs

DW News Interviews Khaligh on Electric Vehicle Trends

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar