Clark School Home UMD

ISR News Story

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910


Congratulations to Associate Professor Ray Adomaitis (ChE/ISR), Professor and former ISR Director Gary W. Rubloff (MSE/ISR), and former ISR-affiliated faculty member John Kidder. On Nov. 23 they received U.S. Patent 6,821,910 for "Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation."

This is a multizone, segmented showerhead for use in chemical vapor deposition, in plasma deposition and etching and other processes. It provides a gas impingement flux distribution controllable in two lateral dimensions to achieve programmable uniformity in recirculation (pumping) of exhaust gases back through the showerhead. It reduces intersegment mixing to achieve a high degree of spatial control of the process. The showerhead is useful for process tuning and optimization in manufacturing or for rapid materials and process discovery and optimization in research and development. | ISR patents page |

—December 2004

December 7, 2004


Prev   Next

 

 

Current Headlines

Alumnus Ravi Tandon receives NSF CAREER Award

Clark School women of note: Avis Cohen

Reza Ghodssi honored as "Person of Impact" by University of Wisconsin

Brain and Behavior Initiative partners with Arena Stage

A nerve modeled on a battery

UMD Engineers Developing Robots to Compete in RoboMasters 2017

Alumnus Peng Qiu Granted Tenure at Georgia Tech

MacCarthy contributing author to new systems engineering book

A peek under a hybrid’s hood reveals wood?

UMD Pushes Beyond Line of Sight to Map Impacts of Traditional Farming in Belize

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar