Clark School Home UMD

ISR News Story

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910


Congratulations to Associate Professor Ray Adomaitis (ChE/ISR), Professor and former ISR Director Gary W. Rubloff (MSE/ISR), and former ISR-affiliated faculty member John Kidder. On Nov. 23 they received U.S. Patent 6,821,910 for "Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation."

This is a multizone, segmented showerhead for use in chemical vapor deposition, in plasma deposition and etching and other processes. It provides a gas impingement flux distribution controllable in two lateral dimensions to achieve programmable uniformity in recirculation (pumping) of exhaust gases back through the showerhead. It reduces intersegment mixing to achieve a high degree of spatial control of the process. The showerhead is useful for process tuning and optimization in manufacturing or for rapid materials and process discovery and optimization in research and development. | ISR patents page |

—December 2004

December 7, 2004


Prev   Next

 

 

Current Headlines

Nau, Gelfand, Goldstein part of MURI developing the potential of mean-field game theory

ECE Names 2017-2018 Distinguished Dissertation Fellows

UMD Celebrates Invention of Year Winners, Ventures, and Partnerships at 'Innovate Maryland'

Ulukus named Anthony Ephremides Professor in Information Sciences and Systems

Maryland researchers develop computational approach to understanding brain dynamics

Alumnus Raef Bassily joins Ohio State as tenure-track faculty

Maryland researchers awarded $1M DARPA Lagrange program cooperative agreement

Bill Regli featured at Global Industrial Cooperation Conference

Brin Family Prize to Support Excellence in Drone-Related Activity

Schizophrenia drug monitoring device research featured on IEEE Sensors Letters cover

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar