Clark School Home UMD

ISR News Story

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910


Congratulations to Associate Professor Ray Adomaitis (ChE/ISR), Professor and former ISR Director Gary W. Rubloff (MSE/ISR), and former ISR-affiliated faculty member John Kidder. On Nov. 23 they received U.S. Patent 6,821,910 for "Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation."

This is a multizone, segmented showerhead for use in chemical vapor deposition, in plasma deposition and etching and other processes. It provides a gas impingement flux distribution controllable in two lateral dimensions to achieve programmable uniformity in recirculation (pumping) of exhaust gases back through the showerhead. It reduces intersegment mixing to achieve a high degree of spatial control of the process. The showerhead is useful for process tuning and optimization in manufacturing or for rapid materials and process discovery and optimization in research and development. | ISR patents page |

—December 2004

December 7, 2004


Prev   Next

 

 

Current Headlines

University of Maryland School of Engineering Announces Unprecedented Investment from A. James & Alice B. Clark Foundation

Clark School Spinout Developing Pediatric Cancer Drug Delivery System to Prevent Hearing Loss from Chemotherapy

UMD Solar Decathlon team takes 1st place in the U.S., 2nd place in the world

UMD Researchers Develop Stable, Robust Li-ion Battery Chemistry

Five ISR faculty part of $8 million NIH grant to combat hearing loss in older people

Building Together Announcement Garners Extensive Media Coverage

Maryland Power Electronics Laboratory participates in Maryland Manufacturing Day

The Home of the Future

Espy-Wilson's technology included in new Alcatel MOVE TIME smart watch

John Baras named AIAA Associate Fellow

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar