Clark School Home UMD

ISR News Story

Soon Cho awarded Outstanding Paper Award


ISR Ph.D. student Soon Cho was awarded the Outstanding Paper Award in the student paper competition at Sematech's Advanced Equipment Control/Advanced Process Control Symposium in Colorado Springs. Soon Cho is advised by Professor Gary Rubloff (MNE/ISR) and is a member of his research group. His report, "Real-Time, In-Situ Metrology to Drive Real-Time Advanced Process Control," described his work with others in Dr. Rubloff's group on using in-situ chemical sensors to achieve process metrology and associated real-time process control. Soon has applied these methods to Si ULSI technology and more recently to GaN MOCVD processes in a joint project at Northrop Grumman. The AEC/APC symposium is the prime conference for R&D achievements in advanced process control.

October 14, 2003


Prev   Next

 

 

Current Headlines

Wu Named AAAS Fellow

Baras, Kenyon, Hughes Network Systems win MIPS Global Impact Award

New microsystems detect, treat bacterial biofilms that cause post-operative infections

DW News Interviews Khaligh on Electric Vehicle Trends

FPE Undergrad Benefits from University FIRE Program

Vishkin, Barua and Ghanim Introduce ICE to Eliminate Programmer’s Multi-Threading – A Productivity-Buster in Parallel Computing

QUEST Celebrates 25th Anniversary

Alumni Naomi Leonard and Xiaobo Tan part of public lecture on underwater robotics

Clark School Spinout Developing Pediatric Cancer Drug Delivery System to Prevent Hearing Loss from Chemotherapy

UMD Solar Decathlon team takes 1st place in the U.S., 2nd place in the world

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar