Clark School Home UMD

ISR News Story

A Method for Determining the Nearest Uniformity Producing Profile (NUPP) for the Control of Thin-Film Processing Systems with Wafer Rotation (ISR IP)

ISR intellectual property available to license

Inventors:
Ray Adomaitis

Description
Researchers at the University of Maryland have come up with a completely new approach to uniformity control in semiconductor and other thin-film deposition processes (e.g. chemical vapor deposition for semiconductor manufacturing) for systems where substrate (e.g. wafers, optical components, etc.) rotation is used to improve uniformity.

Based on purely geometrical characteristics of the deposition system, the algorithm developed identifies all non rotating substrate deposition profiles that result in perfectly uniform profiles under rotation. This allows the identification of Nearest Uniformity Producing Profile (NUPP) of any given substrate profile, opening the door to a new approach to uniformity control.

No current uniformity control schemes recognize the inherent information loss that occurs as a result of the wafer rotation on post processing measurements; the new algorithm makes use of all available information and leads to physically meaningful measurements.

A unique aspect of the proposed uniformity control technique is that it is based on a minimal number of physical assumptions, resulting in a technique applicable to any uniformity criterion in a wide range of thin film processing control, optimization, and design applications, including all CVD (Chemical Vapor Deposition), etch, PVD (Physical Vapor Deposition), ALD (Atomic Level Deposition), and any other thin film process with a rotating substrate, giving the technique very broad industrial impact. Thin film processing in semiconductor, optoelectronic, optical coatings, and other industries will benefit from this approach.

The control algorithm is available in the form of a MATLAB software toolbox, simplifying the implementation of the control and analysis methods. The software also includes numerous full-wafer map analysis, visualization, and model development tools.

For more information
If you would like to license this intellectual property, have questions, would like to contact the inventors, or need more information, contact ISR External Relations Director Jeff Coriale at coriale@umd.edu or 301.405.6604.

Find more ISR IP
You can go to our main IP search page to search by research category or faculty name. Or view the entire list of available IP on our complete IP listing page.

ISR-IP-Adomaitis ISR-IP-CVD ISR-IP-semiconductor ISR-IP-nano ISR-IP-simulation

Related Articles:
Segmented Reactor Showerhead Design with Exhaust Gas Recirculation and Spatially-Resolved Sensing Capability for Chemical Vapor Deposition, Plasma-Enhanced CVD, and Plasma Etch Processes (ISR IP)
An Atomic Layer Deposition Approach to Controlling the Shape Profiles of Nanostructures Deposited Inside Nanoporous Materials (ISR IP)
A Computational Algorithm for Solar Reflector Optimization with Novel Applications in Concentrating Photovoltaic Solar Collector Design (ISR IP)
EquiPSim: Equipment and Process Simulation Learning Module (ISR IP)
SimPLE: Simulated Processes in a Learning Environment (ISR IP)
A Flexible, High Specific Energy Density, Rechargeable Battery (ISR IP)
Micro Fluidic Device that Allows 3 Dimensional Control of Nano and Micro Particles by Electroosmotic Flow (EOF) Actuation (ISR IP)
Positioning Quantum Dots in Devices by Electroosmotic Feedback Control (ISR IP)
Lateral Two-Terminal Nanotube Devices and Method for their Formation (ISR IP)
Minimally Invasive Neurosurgical Intracranial Robot (ISR IP)

June 22, 2007


Prev   Next

 

 

For more information, contact ISR External Relations Director
Jeff Coriale at coriale@umd.edu or 301.405.6604.

Current Headlines

Clark School Participates in Solar Eclipse

Researchers part of two NSF Neural & Cognitive Systems grants worth more than $1.2 million

ISR researchers win additional $948K NSF Neural and Cognitive Systems grant

Schonfeld, Ryzhov team up for NSF EAGER grant

Yu Named ASME Fellow

Khaligh-led student team wins award at IEEE IFEC competition

Former postdoc Eirini Tsiropoulou named to IEEE ComSoc "rising stars" list

TEDCO Invests $1M into Innovative Companies Including Rajeev Barua’s Startup SecondWrite LLC

Banis wins poster design award at Global Grand Challenges Summit

ISR faculty leading bio-inspired robotics and transportation electrification REUs

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar