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A Device and Method for Measuring Microcantilever Beam Displacement by Interference Fringe Shifting (ISR IP)

ISR intellectual property available to license

Inventors: Stephan Koev, Reza Ghodssi

For more information
If you would like to license this intellectual property, have questions, would like to contact the inventors, or need more information, contact ISR External Relations Director Jeff Coriale at coriale@umd.edu or 301.405.6604.

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You can go to our main IP search page to search by research category or faculty name. Or view the entire list of available IP on our complete IP listing page.

ISR-IP-Ghodssi ISR-IP-MEMS ISR-IP-sensors

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June 23, 2007


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For more information, contact ISR External Relations Director
Jeff Coriale at coriale@umd.edu or 301.405.6604.

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