ISR News Story
DeVoe wins DURIP for deep reactive ion etcher
Assistant Professor Don DeVoe (ME/ISR) is the principal investigator for a new Defense University Research Instrumentation Program (DURIP) award. DeVoe's award is for a Deep Reactive Ion Etcher The award is one of six recently announced DURIP awards for the University of Maryland, five of which were won by faculty in the Clark School of Engineering.
ISR Directory Gary Rubloff called the Deep Reactive Ion Etcher "a critical component of ISR's capability for Microelectromechanical Systems (MEMS) fabrication and nanotechnology. Both are central to a number of key ISR efforts in a broad range of sensor/actuator technologies and their systems-level implications and applications," he said.
Dean Nariman Farvardin announced the other engineering DURIP awards won by the Clark School :
Farvardin said, "Obtaining such awards makes it possible for the college to more rapidly build up its research laboratories. I wish to congratulate the successful PIs and thank them for their hard work in securing the funds we need to modernize and improve our research facilities."
February 17, 2001