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Focused Ion-Beam Fabrication of Fiber Probes for Use in Near Field Scanning Optical Microscopy

Abstract 

A method of forming a fiber probe having an aperture for use in near-field scanning optical microscopy. The method includes a first steps of coating an optical fiber having a tapered tip with a metal layer. Next is a step of milling the tapered tip and metal layer such that an aperture is formed through the metal layer at the tapered tip. The milling step includes focused ion-beam milling the tapered tip and metal layer. The focused ion-beam milling can be done by raster scanning the focused ion-beam in a rectangular pattern at an apex of the tapered tip. Also, the fiber probe made through the above outlined method is used in near-field scanning optical microscopy.

Inventor(s)

Igor Smolyaninov
Klaus Edinger
Walid Atia
Saeed Pilevar

Date Issued 

10/14/2003

Patent No. 

6,633,711