University of Maryland

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Computer Integrated Manufacturing Laboratory

Sequencing Wafer Handler Moves To Improve Cluster Tool Performance

Jeffrey W. Herrmann
Department of Mechanical Engineering and Institute for Systems Research
University of Maryland

Copyright Notice: This paper is a preprint of a paper accepted for the 2003 Industrial Engineering Research Conference, Portland, Oregon, May 18-20, 2003. Personal use of this material is permitted. However, permission to reprint or republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the copyright holder.


Cluster tools can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves determines the time needed to complete a set of wafers. This paper presents scheduling problems for sequential and hybrid cluster tools and reviews the performance of several algorithms.

Download: Click on the following link to download the paper. The file is in PDF format.

Last updated by Jeffrey W. Herrmann, March 26, 2003.

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