losleben@cis.stanford.edu
Yes, we are just completing a 10 year program on Semiconductor Manufacturing. You can find the abstract and other information requested at: http://www-mansci.stanford.edu/mansci/ (I believe we are the first to coin the expression "virtual factory.") We will probably be adding the final report elements of this directory in a month or so. We are now embarking on a major new program which also has a large component relating to simulation and modeling of advanced micro- and nanostructures and the processes used to produce them. It is still sparcely populated, but you might find the following interesting: http://aramis.stanford.edu/comproto_home.html This is a temporary server and will be relocated to another machine in about a month.
A List of Responders
Virtual Manufacturing Background Project
Virtual Manufacturing Home Page