Marc J. Madou
Ohio State University
Marc J. Madou
is Center for Materials Research (CMR) Scholar at Ohio State University (OSU),
and also Professor, Department of Materials Science and Engineering,
Professor of Chemistry,
Co-director Center for Integrated Sensors and Instruments (CISM) all at OSU,
a Principal in Microfabrication Applications,
NASA Ames Research Center Associate, and a
Visiting Scholar at University of California at Berkeley.
He received his
Ph.D. in 1978 in Semiconductor Electrochemistry, at the Solid-State Physics
Laboratory, Rijksuniversiteit, Ghent, Belgium.
Dr. Madou's Research Interests:
Semiconductor/liquid and semiconductor/gas interfacial studies; chemical
sensors and biosensors; miniaturization methodology and scaling laws;
micromachining with thin and thick film technology; electrochemistry of
metals, semiconductors and insulators; batteries; solar cells; impedance
measurements; acoustic sensors and sensor arrays combined with analytical
instruments; polymeric actuators; continuous manufacturing methodology for
biomedical sensors; fluidics; AFM/STM in solution.
Dr. Marc Madou's application oriented work is in sensor development,
especially microfabrication of chemical and biological sensors. These
sensors include micromachined medical sensors such as for glucose, urea, blood
electrolytes (pH, sodium, potassium, calcium, etc.) and blood gases (O2 and
CO2), as well as immuno sensors and breath by breath analyzers. His research
in this field also includes bio-telemetric sensors which are in the form of
small pills that send diagnostic information out from within the living body.
Dr. Marc Madou also works on sensors with industrial applications such as
automotive sensors; an oil degradation monitor, a planar amperometric oxygen
sensor and an NOx sensor as well as a trace gas analysis system based on a
micro-volcano ionization source in an ion mobility chamber. Mechanical type
sensors Madou worked on include AFM tips, pressure sensors and accelerometers.
Recently Dr. Madou started work in collaboration with NASA Ames on an
alternative electronic nose by combining a small smart gas sensor array (a set
of chemiresistors on a Flexural Plate Wave Devices) with a modified and
simplified gas chromatograph.
From a more fundamental point of view Dr. Madou is interested in applying
micromachining to explore new physics and chemistry by working with
micromachined devices where macro physical laws break down. He is currently
testing some of his ideas in this area in gas-electrochemistry and
sono-voltammetry. Beyond searching for non-linear effects through
micromachining Dr. Madou is also working towards smart materials including an
attempt to make artificial muscle by combining micromachining in Si with
More information may be obtained by following links from Dr. Madou's
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