RTP Wafer Heat Transfer Model
[Transient] = [Conductive] + [Radiative] + [Convective] + [Constant] + [Lamp Heating]
Tw n-vector of temperatures at radial positions
Ac, Ar, Av, ? determined using material properties
B lamp radiant intensity profiles determined using view factors and experimental verification
P m-vector of control inputs (lamp zone power levels) (m=3)
Ttc p-vector of thermocouple measurements (p=3)
C matrix of thermocouple locations