Model Reduction for RTP Wafer Heat Transfer Predictive Capability and Comparison
Test 2
Test 1
Reduction
Method
1
2
3
4
POD RSC
27.2
2.7
0.6
0.1
POD POC
26.9
1.3
1.1
0.1
Balancing
50.7
7.0
0.4
0.1
Reduced Model Order
Reduction
Method
1
2
3
4
POD RSC
72.3
5.2
1.5
0.2
POD POC
72.6
4.8
4.4
0.4
Balancing
80.8
14.3
1.7
0.1
Reduced Model Order
Maximum deviation (degrees C)
from order 101 model
Previous slide
Next slide
Back to first slide
View graphic version