Clark School Home UMD

ISR News Story

Soon Cho awarded Outstanding Paper Award


ISR Ph.D. student Soon Cho was awarded the Outstanding Paper Award in the student paper competition at Sematech's Advanced Equipment Control/Advanced Process Control Symposium in Colorado Springs. Soon Cho is advised by Professor Gary Rubloff (MNE/ISR) and is a member of his research group. His report, "Real-Time, In-Situ Metrology to Drive Real-Time Advanced Process Control," described his work with others in Dr. Rubloff's group on using in-situ chemical sensors to achieve process metrology and associated real-time process control. Soon has applied these methods to Si ULSI technology and more recently to GaN MOCVD processes in a joint project at Northrop Grumman. The AEC/APC symposium is the prime conference for R&D achievements in advanced process control.

October 14, 2003


Prev   Next

 

 

Current Headlines

Khemani and Campos are Qualcomm Innovation Fellowship finalists

Pioneering Breakthrough: Unmanned Aircraft Delivers Organ for Successful Kidney Transplant in Maryland

UMD workshop examines risks related to new transportation technology

ECE Names 2018-2019 Distinguished Dissertation Fellows

Solar evaporator offers a fresh route to fresh water

Professor: Snow melt drives not only spring flooding, but summer droughts

Algorithms and Autonomous Discovery

Machine Learning's Translational Medicine

Espy-Wilson Honored at UMD’s First to ADVANCE Celebration

Timothy J. Regan to deliver Kirlin/Whiting-Turner Lecture on April 18

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar