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Electrically Driven Microfluidic Pumping for Actuation


An actuator cell includes a supply chamber containing fluid, and an expansion chamber for receiving fluid from the supply chamber, and being expandable to deform a predetermined area of the actuator cell. The actuator cell further includes a channel providing a fluid flow passage between the supply and expansion chambers, and a compliant material substantially surrounding the supply chamber, the expansion chamber and/or the channel. An electric circuit applies an electric field adjacent the supply and expansion chambers, and thereby causes fluid flow from the supply to the expansion chamber.


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