Adomaitis, Raymond A.
Our research focuses on simulation-based design, optimization, and experimental evaluation of advanced materials manufacturing processes. We are particularly interested in developing new reactor designs for thin-film deposition of semiconductor materials for electronic and solar energy applications.
One of our major areas of activity is in the development of next-generation thin film chemical vapor deposition (CVD) and atomic-layer deposition (ALD) systems. We have developed and tested new reactor design concepts which enable explicit manipulation of the gas-phase composition across the substrate surface during processing, making combinatorial CVD studies and other novel operating modes (including deposition on extremely large substrates) possible. Current work relevant to microelectronic and solar cell manufacturing includes Si CVD, epitaxial growth of III-V compounds, and ALD of metal oxide films.
Important numerical tools developed in our research group in close collaboration with industrial partners include a full-wafer response-surface modeling methodology applicable to the optimization and control of film properties across the entire substrate, and a model-free uniformity control approach based on identifying the Nearest Uniformity Producing Profile (NUPP) for reactor systems with rotating substrates.
Ray Adomaitis received his B.S. and Ph.D. in Chemical Engineering from the Illinois Institute of Technology. After two years working on computational nonlinear dynamics as a postdoctoral researcher at Princeton University, he joined the Institute for Systems Research (ISR) at the University of Maryland as a postdoctoral fellow. Currently, he is a Professor and Associate Chair for Undergraduate Studies in the Chemical and Biomolecular Engineering Department with a joint appointment at the ISR at the University of Maryland. He also is affiliated with the Maryland NanoCenter and the University of Maryland Energy Research Center (UMERC).
Ray's research interests focus on simulation and design of thin-film manufacturing processes with applications in microelectronics, alternative energy, nanomanufacturing, and spacecraft systems. Most of his current efforts are directed to developing physically based models of atomic layer deposition surface reaction kinetics to provide simulation tools for the scale-up and optimizion of these manufacturing processes. His teaching activities include undergraduate and graduate-level classes in solar energy, chemical engineering computations, and capstone process design. Among other awards and activities, he is fellow of the American institute of Chemical Engineers.
|Professor, Chemical Engineering and ISR, University of Maryland|
|2001-2009||Associate Professor, Chemical Engineering and ISR, University of Maryland|
|2004-2006||Acting Chair, Chemical & Biolomolecular Engineering, University of Maryland|
|2001-2004||Associate Chair for Graduate Studies, Chemical & Biomolecular Engineering, University of Maryland|
Assistant Professor, Chemical Engineering and ISR, University of Maryland
|1990-1995||Postdoctoral Fellow/Research Scientist, ISR, University of Maryland|
Honors and Awards
American Institute of Chemical Engineers, 2011
Young faculty awards
NSF Engineering Education Scholar, 1995
University of Maryland awards
Teacher of the Year, 1996
Professor of the Year, 1997
ISR Outstanding Systems Engineering Faculty Award, 2005
- Thin film process simulation and design
- Process Sensing and Simulation for GaN-based Semiconductor Electronics
- Materials, Nano, & Bio Research for Systems
- Multiscale ALD and CVD Simulation
- Full Wafer Map Response Surface Models for Combinatorial Chemical Vapor Deposition Systems
- Reaction Kinetics and Transport Model for Gallium Nitride MOVPE Reactor Showerhead Design
- Gas Flow Modeling in MEMS Based Microvalves for Next-Generation CVD Reactor Designs
- Development of a Spatially Controllable Chemical Vapor Deposition System: Preliminary Experimental Evaluation
- Design and Simulation of Mass Spectrometry System Monitor Programmable CVD Process
- An Object-Oriented Modular Simulation Framework for Semiconductor CVD Processing Systems
- Thin-film manufacturing process technology