Multiscale ALD and CVD Simulation

Faculty

Raymond A. Adomaitis, Vivek Dwivedi, David Arana-Chavez, Negin Shahshahan, Deepa Subramanian, Glenn Guglietta, Tim Wanga

Year

2009

Research Area

ControlOperations Research and Manufacturing

File

PDF icon Adomaitis_multiscale.pdf

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