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A. James Clark School of Engineering, University of Maryland
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Research Posters
Gas Flow Modeling in MEMS Based Microvalves for Next-Generation CVD Reactor Designs
Gas Flow Modeling in MEMS Based Microvalves for Next-Generation CVD Reactor Designs
Faculty
Gary Rubloff
,
Raymond A. Adomaitis
, R. Sreenivasan
Year
2004
Research Area
ControlOperations Research and Manufacturing
File
R-A_GasFlow.pdf
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R-A_GasFlow.pdf
R-A_GasFlow.pdf
R-A_GasFlow.pdf