OE-MEMS Chip-Based Mass Sensor for Chemical, Gas, and Bio-Hazard Sensing (ISR IP)
For more information, contact ISR External Relations Director
Jeff Coriale at email@example.com or 301.405.6604.
Currently three methods are used to generate a readout of MEMS cantilever sensors: 1) measurement of the change in cantilever resonance frequency upon mass loading, 2) measurement of the cantilever deflection by reading the laser beam reflection from the cantilever, and 3) measuring the piezoelectric voltage generated by cantilever deflection.
All three techniques have inherent disadvantages. The first requires an electric signal that is subject to electromagnetic interference (EMI), the second has all the disadvantages of intensity measurement technology, including lack of portability and sensitivity to optical power fluctuations, and the third technique requires uneven application of piezoelectric material to the two faces of the cantilever.
Inventors at the University of Maryland have developed a reliable and low-cost detection system having immunity to EMI, from a wavelength shift of a light source, a wide dynamic range and a high accuracy unaffected by a noisy environment that has turbulent gas flow, abrupt pressure changes or mechanical vibrations.
In addition, the invention employs an integrated VLSI processing module allowing for a smart sensor configuration.
For more information
If you would like to license this intellectual property, have questions, would like to contact the inventors, or need more information, contact ISR External Relations Director Jeff Coriale at firstname.lastname@example.org or 301.405.6604.
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Published June 22, 2007