Processing and Characterization of PMSSQ Based Materials for Nanoporous Low-K Dielectrics

Faculty

Gary Rubloff, J.J. Park, Z. Lin, P. Lazzeri, L. Vanzetti, M. Bersani, M. Anderle (ITC-irst, Italy), R.D. Miller (IBM Almaden Research Center)

Year

2004

Research Area

Micro and Nanosystems

File

R-A_PMSSQ.pdf