In-situ Semiconductor Process Metrology for Real-Time APC (advanced Process Control)

Faculty

Gary Rubloff, John Kidder, Yijun Liu, Laurent Henn-Lecordier, Soon Cho, Yiheng Xu, Carl Gogol, Abdul Wajid

Year

2002

Research Area

ControlOperations Research and Manufacturing

File

Rubloff_InSituMetrology.pdf