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Abstract

A method of determining the reaction efficiency of a CVD process reactor by which a reactive gas combination entering the reactor deposits a solid reaction product as a thin film onto a substrate. The composition of the reactive gas combination is measured by an acoustic cell which is disposed downstream from the outlet port of the reactor to determine the reactor's efficiency. Determination of the reactor's efficiency allows the growth rate of the thin film to be determined as well as associated rates of the products which have been exhausted from the reactor.

Abstract

This invention provides a fabrication process for manufacturing of truly 3-dimensional micromechanisms which takes advantages of SOI (silicon-on-insulator) wafers each of which is processed to create a respective structural element of the 3-dimensional micromechanisms by DRIE (deep reactive ion etching) of the wafer and thermal oxidation of the trenches opened during the DRIE etching. The wafers are sequentially bonded into a multistack structure from which the 3-D micromechanism. is released by XeF.sub.2 etching.

Abstract

A fiber optic sensor system for acoustic measurements over a 6 kHz bandwidth, the design of which allows for multiplexity of the input side of the system, and where the optical part of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer as well, that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source, as well as the optical intensity fluctuations.

Abstract

A fiber optic sensor system for pressure measurements where the design permits multiplexity on the input side of the system and the optical part of the system, which has a sensor Fabry-Perot interferometer and a read-out interferometer, is based on low coherence fiber-optic interferometry techniques. This permits a high dynamic range and low sensitivity to the wavelength fluctuation of the light source as well as to the optical intensity fluctuations. The system includes fiber tip based Fabry-Perot sensors, where each sensor includes a diaphragm as the transducer.

Abstract

A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel.

Abstract

A micro-optical fiber tip based sensor system for pressure, acceleration, and pressure gradient measurements in a wide bandwidth, the design of which allows for multiplexity of the input side of the system is based on micro-electromechanical fabrication techniques. The optical portion of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer combination that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source.

Abstract

An actuator cell includes a supply chamber containing fluid, and an expansion chamber for receiving fluid from the supply chamber, and being expandable to deform a predetermined area of the actuator cell. The actuator cell further includes a channel providing a fluid flow passage between the supply and expansion chambers, and a compliant material substantially surrounding the supply chamber, the expansion chamber and/or the channel.

Abstract

An electrically conductive, compliant elastomer material that is impregnated with a metal is formed by combining a metal salt with an elastomer precursor material to form a metal salt/precursor mixture, curing the metal salt/precursor mixture to form an elastomer impregnated with metal salt, and treating the elastomer impregnated with metal salt with a chemical reducing composition so as to convert at least a portion of the metal salt impregnated within the elastomer to a metal.

Abstract

The amine-containing polysaccharide chitosan was selectively deposited onto patterned gold surfaces in response to an applied voltage. Standard microfabrication techniques were used to pattern gold onto silicon wafers, and these gold patterns served as templates for the electric field directed deposition of chitosan. Experiments conducted with a fluorescently labeled chitosan derivative demonstrated the spatially selective deposition of chitosan onto gold surfaces that were polarized to serve as negative electrodes.

Abstract

A method for biolithographical deposition of molecules is provided. According to an embodiment of the method, a reactive layer (e.g., a polysaccharide mass) having a surface region coated with a biologically compatible resist is provided. A portion of the biologically compatible resist is selectively removed to expose an exposed portion of the reactive layer. Molecules, such as biomolecules and/or cellular species, are then conjugated to the exposed portion of the reactive layer. Also provided are materials and devices related to the method.

Acoustic Consumption Monitor

Abstract

A Process for Fabrication of 3-Dimensional Micromechanisms

Abstract

Fiber Tip Based Sensor System for Acoustic Measurements

Abstract

Fiber Tip Based Sensor System for Measurements of Pressure Gradient, Air Particle Velocity and Acoustic Intensity

Abstract

Fabrication and Integration of Polymeric BioMEMS

Abstract

Micro-Optical Sensor System for Pressure, Acceleration, and Pressure Gradient Measurements

Abstract

Electrically Driven Microfluidic Pumping for Actuation

Abstract

Electrically conductive metal impregnated elastomer materials and methods of forming electrically conductive metal impregnated elastomer materials

Abstract

Spatially selective deposition of polysaccharide layer onto patterned template

Abstract

Biolithographical deposition and materials and devices formed therefrom

Abstract

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