Focused Ion Beam Fabrication of Fiber Probes for Use in Near-Field Scanning Optical Microscopy (ISR IP)

For more information, contact ISR External Relations Director
Jeff Coriale at coriale@umd.edu or 301.405.6604.

ISR intellectual property available to license

Inventors
Saeed Pilevar, Klaus Edinger, Walid Atia, Igor Smolyaninov, Christopher Davis

US Patent: 6,633,711

Description
A new focused ion-beam (FIB) fabrication method has been developed to produce very clean, well-defined and highly reproducible sub-wavelength fiber probes with metallic apertures of a desired diameter for use in near-field scanning optical microscopy (NSOM). The ion beam milling process can eliminate the obstruction of apertures caused by conventional metallic coating techniques, and thus increase the optical output.

For more information
If you would like to license this intellectual property, have questions, would like to contact the inventors, or need more information, contact ISR External Relations Director Jeff Coriale at coriale@umd.edu or 301.405.6604.

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ISR-IP-Davis ISR-IP-near-field ISR-IP-nano

Published June 17, 2007