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Rubloff, Gary

Gary Rubloff
Distinguished University Professor
Minta Martin Professor of Engineering
Former Director, Maryland NanoCenter
Former Director, Institute for Systems Research
1128 Jeong H. Kim Building

Research Interests 

Biomaterials and biomicrosystems (bioMEMS); electronic materials, processes and equipment (combinatorial CVD and ALD, atomic layer deposition, semiconductor materials); semiconductor manufacturing (simulation, sensing and control); nanoscale systems (nanocomponent decoration, directed assembly)



Dr. Rubloff has published more than 160 papers, holds 19 patents and 6 IBM Invention Achievement Awards. He won the AVS Gaede-Langmuir Prize in 2000 "for inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing". This award was established 1977 to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the AVS. He is a Fellow of APS and AVS. His research has included solid state physics, surface physics and chemistry, interfaces, semiconductor materials and processing science and technology, process diagnostics and modeling, manufacturing science, combinatorial materials science, biomaterials and bioMEMS. His semiconductor process research has emphasized the elucidation of chemical and physical mechanisms involved in surface cleaning, thermal oxidation, chemical vapor deposition, and plasma etching, and in pursing these directions he pioneered the exploitation of ultrahigh vacuum process environments and their integration with in-situ surface and interface diagnostics.

Dr. Rubloff received his B.A. in Physics magna cum laude from Dartmouth College in 1966, his M.S. in 1967 and his Ph.D. in 1971 in Physics from the University of Chicago. He held a postdoctoral position in Physics at Brown University from 1971 to 1973. In 1973 he joined IBM Research, Yorktown Heights, NY, as a Research Staff Member in the Physical Sciences Department, were he worked on surface and interface science. In 1984-85 he served as Technical Assistant to the IBM Research Vice-President for Logic and Memory, and from 1985 to 1991 he continued his research while serving in several capacities as Manager of exploratory materials and processing in the Silicon Technology Department. From 1992-1993 he was Manager of Thin Film Process Modeling in the Manufacturing Research Department. From 1992 to 1997 he was also Professor Adjunct in Electrical Engineering at Yale University.

He joined academia in 1993 as Associate Director of the NSF Engineering Research Center for Advanced Electronic Materials Processing and Professor of Electrical and Computer Engineering at North Carolina State University, focusing on real-time process sensing, simulation, optimization, and control.

In 1996 he joined the University of Maryland as Professor in the Department of Materials Science and Engineering and the Institute for Systems Research. He served as Director of the Institute from 1996 to 2001. In 2004 he was named Minta Martin Professor of Engineering and assumed the position of founding Director of the Maryland NanoCenter. He is also an affiliate faculty member of the Department of Electrical and Computer Engineering and the Institute for Research in Electronics and Applied Physics (IREAP), and is part of the graduate program in bioengineering.

Dr. Rubloff was the founding Chairman of the AVS Manufacturing Science and Technology Group from 1992-1997 and continues to serve on its Executive Committee. He has been a member of the Metrology Technical Working Group for the SIA's National Technology Roadmap for Semiconductors since its inception in 1994. He has been active in professional society work, including the Board of Directors of the AVS, Executive Committees of the AVS Electronic Materials and Processing Division, the APS Materials Physics Division, and the Editorial Board of the Journal of Vacuum Science and Technology. He has long been active in civic affairs, included 11 years service as an elected Member, Vice-President, and President of a local Board of Education in New York State.

Honors and Awards 

American Physical Society, 1986
American Vacuum Society, 1993

Professional awards
American Vacuum Society Gaede-Langmuir Award, 2000

University of Maryland awards
Invention of the Year (Physical Science): A Revolutionary, High Energy Density Nanopore Battery, 2015
Invention of the Year (Physical Science): Nano Arrays for Energy Storage, 2010

Related News 

Company Co-Founded by Sergio Baron Delivers Ultra-Thin, Custom Shape Lithium Batteries
CEO and Co-Founder Baron (M.S. '12) has led the development of ultrathin lithium battery technology for sleek and flexible medical devices, IoT and wearable devices. March 13, 2019

Ghodssi gives distinguished lecture on devices for gastrointestinal health at EPFL in Switzerland
Trip also included visits to the Wyss Center and Imperial College London. March 7, 2019

A New Dimension for Batteries
Nanostructured battery is safe, manufacturing-compatible, and delivers much higher power at high energy August 13, 2018

ISR remembers George Reynolds
The longtime Northrop Grumman friend of ISR has passed away at age 73. August 1, 2018

Gary Rubloff keynote speaker at IEEE nanotechnology conference
Topic: “From Nanostructures to Mesoscale Architectures: Electrochemical Storage for Smart Things.” July 23, 2018

Prof. Sang Bok Lee appointed director of Maryland NanoCenter
UMD chemist will direct two labs on nanoscale fabrication and characterization June 14, 2018

EFRC NEES-2 meeting poster contest winners
Accomplishments meeting announces poster awards June 5, 2018

UMD Researchers Focus Energy on Current Collector Improvements
Research paper published in Advanced Energy Materials. January 16, 2018

New microsystems detect, treat bacterial biofilms that cause post-operative infections
'Flexible impedance sensor' can fit inside urinary catheters, monitor and treat biofilms. November 17, 2017

Research Review: Combating biofilms with microsystem devices
New microsystems detect, treat bacterial biofilms—the source of many post-operative infections; latest device can sense and treat biofilm inside urinary catheters. September 15, 2017

Decade of TMV research leads to never-before-seen microsystems for energy storage, biosensors and self-sustaining systems
Long-term Ghodssi-Culver partnership has used the Tobacco mosaic virus as a biological nanoscaffold for groundbreaking devices. June 19, 2017

Alexander Pearse wins Dean's Doctoral Research Award
Advised by Gary Rubloff, his research is titled, "Development of Vapor-Phase Deposited Three Dimensional All-Solid-State Batteries." May 8, 2017

Congratulations ISR graduates!
These new alumni graduated from the University of Maryland in December 2016. December 20, 2016

NanoCenter thanks departing co-founder
High-tech fabrication technique produces departure gift December 1, 2016

Four Clark School Professors Named Distinguished University Professor
In 2016, four of the 10 Distinguished University Professors named by the University of Maryland are Clark School professors. September 6, 2016

Gary Rubloff named Distinguished University Professor
Rubloff receives highest academic honor conferred by the University of Maryland. August 8, 2016

Rubloff, Ghodssi to speak at TechConnect World Innovation Conference and Expo
The event is the largest global innovation conference in physical and life sciences. April 28, 2016

Rubloff Discusses UMD Energy Storage Center and Energy Science Hot Topics
UMD prof and center director on Electrochemical Society meeting podcast December 8, 2015

Gary Rubloff to receive Senior Faculty Outstanding Research Award
Clark School honor celebrates strong and influential research. November 4, 2015

Subramanian and Wheeler win 2015 ISR awards
Graduate student and staff member honored at annual ceremony. September 17, 2015

Mesoscale Science Research Highlighted on Materials Journal Cover
Rubloff and Lee show new direction in electrical energy storage September 9, 2015

New Battery Demonstrates “Sweet Spot” of Electrolyte Thickness and Composition
Atom-scale synthesis makes highly conductive LiPON for solid-state battery July 28, 2015

Cumings Named Interim Director of Maryland NanoCenter
Appointment effective July 1. July 5, 2015

Reza Ghodssi named AVS Fellow
Citation reads: "For outstanding leadership in microsystems technology achieved by combining knowledge of materials and processing, innovative device concepts, and diverse applications." June 10, 2015

Thin coatings controlled at atomic scale protect high performance lithium anodes
Anodes with layer of alumina resist corrosion and cycle well June 9, 2015

Members of NEES Gather for 2015 Spring Accomplishment Meeting
Poster session, in-depth discussions, presentations.... and hiking May 27, 2015

Rubloff, Wu win UMD Invention of the Year Awards
Inventions selected for potential impact on science, society, and the open market. May 1, 2015

Rubloff One of 9 Finalists for UMD Invention of the Year
Office of Technology Commercialization to announce winners at the Celebration of Innovation and Partnerships, April 29. March 24, 2015

UMD To Celebrate Innovations and Partnerships April 29
Nine nominees for Invention of the Year to be recognized at annual event March 23, 2015

A Billion Holes Can Make a Battery
Battery inside a nanopore has commercial potential November 6, 2014

UMD Researchers Bridge Gap between Microelectronics, Biological Systems
“Electronic modulation of biochemical signal generation” published in Nature Nanotechnology July 28, 2014

Department of Energy renews NEES EFRC for four years
The center develops highly ordered nanostructures that offer a unique way of looking at the science of energy storage. June 20, 2014

Rubloff, Ghodssi featured in JVST-A special issue
The Journal of Vacuum Science & Technology A is celebrating the 60th anniversary of the American Vacuum Society. October 30, 2013

NSF Grants for Graphene Research Awarded to Hu, Rubloff
Research at the nano-scale nets university over half-million dollars in funding August 26, 2013

Nano ‘Beads on a String’ Could Advance Battery Technology
Pulsing with lithium, tiny silicon beads on a nanotube hold promise for better batteries February 26, 2013

Rubloff Co-Authors Major DoE Report on Emerging Energy Technologies
Publication focuses on opportunities in mesoscale science. December 5, 2012

Award Funds Development of Solid-State, High Power Lithium-Air Battery
Schroeder named John and Maureen Hendricks Energy Research Fellow. March 2, 2012

Six ISR grad students in Clark School Future Faculty Program
Program helps students prepare for academic careers in top-50 engineering schools. February 14, 2012

Preventing Costly, Life-Threatening Catheter Infections
Deutsch Foundation-sponsored Clark School research offers multi-pronged attack on major medical problem. January 18, 2012

Bacteria Programmed to Re-Create UMD Logo
Feat part of larger body of Clark School research into preventing infections. December 13, 2011

Profile of alumnus Parag Banerjee
Former student of Gary Rubloff now on faculty at Washington University in St. Louis. December 1, 2011

Gregorczyk Wins Second L-3 Fellowship
Award provides stipend, travel credit, tuition waiver, and discretionary funds. September 26, 2011

Clark School researchers figure prominently in atomic layer deposition story
Chemical & Engineering News highlights expansion of the coating technology. August 3, 2011

Controlling chemistry improves potential of carbon nanotubes
Nanotechnology breakthrough could lead to better batteries, more sensitive biosensors. July 11, 2011

International partnership agreement being finalized
International relationship will include research and education components. May 27, 2011

Rubloff quoted in story about DOE Energy Frontiers Research Centers
Rubloff says science should be "more use-inspired." May 25, 2011

"Pocket Change Spectroscopy" Improves Detection of Toxins, Explosives
Betz, Rubloff Highlighted in Chemical & Engineering News. April 25, 2011

ISR's busy November: NSF site visit, 25th anniversary dinner, SAC meeting
The Institute for Systems Research held three major events from Nov. 17–19. December 14, 2010

Materials Scientists, Conservators Join Forces to Preserve Silver Artifacts and Art
Team developing nanometers-thick, protective coatings using atomic layer deposition. October 25, 2010

Galloway, Gregorczyk, Gremillion awarded L-3 Graduate Research Fellowships
Fellowships support Ph.D. candidates working in specific research areas. October 9, 2010

Work by grad student Parag Banerjee cited in MRS Bulletin
Paper by student of Gary Rubloff originally appeared in ACS Nano. May 17, 2010

Clark School honors Rajkowski, Beyaz, Banerjee for student research
Students score in Dean's Student Research Award Competition. May 6, 2010

Espy-Wilson, Rubloff win 'Invention of the Year' awards
Inventions could improve speech comprehension in noisy environments, battery capacity. April 14, 2010

Reza Ghodssi guest edits special issue of IEEE Transactions on Industrial Electronics
'Special Proceeding' issue focuses on energy harvesting. March 3, 2010

Rubloff Team Wins $2.8M Army Grant
Funds support design of nano-tech coherent dielectric barriers for quantum computing. December 14, 2009

Former Director Eyad Abed honored at ISR reception
Abed is now a dean at United Arab Emirates University. December 7, 2009

Clark School hosts PowerMEMS 2009 attendees for luncheon, lab tours
Six laboratories showcased in special tours. December 7, 2009

Rubloff Group Research Selected for Highlights in Chemical Technology.
Paper covers advances in lab-on-a-chip technology. November 20, 2009

Mariano Anderle visits ISR from Province of Trento, Italy
Longtime friend of ISR is exploring new collaborations and partnerships. November 18, 2009

Student research: Israel Perez
Student of Gary Rubloff is discovering how nanoporous anodic aluminum oxide can be used as a platform for energy storage. May 26, 2009

UMERC/Nanocenter Team Named "Energy Frontier" Center
DOE to award $14M for nanotech storage technology crucial to renewable energy success. May 13, 2009

Dean Berlin places second in research competition
Berlin is a graduate student of Professor Gary Rubloff. May 12, 2009

Parag Banerjee Wins Presidential Student Award
Microscopy Society of America honors MSE grad student for nanotube crystallization paper. April 6, 2009

NanoCenter Improves Energy Storage Options
Maryland NanoCenter researchers create new device to store electrical energy. March 16, 2009

Student research: Xiaolong Luo
Student of Gary Rubloff conducts 'lab-on-a-chip' microsystem research. January 27, 2009

Ghodssi, Rubloff receive bioMEMS patent
U.S. patent 7,375,404 is awarded for fabrication and integration of polymeric bioMEMS. June 3, 2008

Vorontsov, Koev, Wei and McKinney win at ISR awards ceremony
Quartet honored for outstanding contributions in 2007–2008. May 28, 2008

S.K. Gupta and teammates win 2007 'Invention of the Year' physical science award
Gupta also finalist in information science category; Gary Rubloff finalist in physical science. April 24, 2008

Subrahmanian wins first ISR Faculty Venture Fair
Online opinion technology impresses venture capitalists at ISR Systems Symposium. April 20, 2008

New Advance in Biochip Research
Microfactories for drug research are one step closer to reality. April 7, 2008

Ghodssi, Rubloff part of $2 million NSF grant
Cellular and biomolecular engineering research to focus on biofunctionalized devices. August 28, 2007

Lateral Two-Terminal Nanotube Devices and Method for their Formation (ISR IP)
This IP is available to license. June 23, 2007

Controlled Electromechanical Deposition of Polysaccaride Film and Hydrogel and Materials Formed Therefrom (ISR IP)
This IP is available to license. June 22, 2007

Assembly of Chitosan onto an Electrode Surface (ISR IP)
This IP is available to license. June 22, 2007

Micro-Knife-Edge Techniques for Sealing of Microfluidic Systems (ISR IP)
This IP is available to license. June 22, 2007

Programmable Selective Deposition of Biofunctional Polymer Surfaces (ISR IP)
This IP is available to license. June 21, 2007

Thermo-Bio-Lithography (ISR IP)
This IP is available to license. June 21, 2007

Fabrication and Integration of Polymeric BioMEMS (ISR IP)
This IP is available to license. June 21, 2007

EquiPSim: Equipment and Process Simulation Learning Module (ISR IP)
This IP is available to license. June 18, 2007

SimPLE: Simulated Processes in a Learning Environment (ISR IP)
This IP is available to license. June 18, 2007

Segmented Reactor Showerhead Design with Exhaust Gas Recirculation and Spatially-Resolved Sensing Capability for Chemical Vapor Deposition, Plasma-Enhanced CVD, and Plasma Etch Processes (ISR IP)
This IP is available to license. June 18, 2007

Rubloff, Bentley quoted in Business Gazette's 'nanofactories' story
Nanocenter faculty explain how cell-like factories in the body may prevent and cure illnesses. April 9, 2007

NSF Funds Microscopy Facility Upgrades
Kim Building laboratory will benefit from added chemical analysis capabilities. September 13, 2006

$1 Million For Nano-Bio Initiative
Deutsch Foudation will fund Clark School bioengineering research on the nanoscale. August 31, 2006

Crab Nano-Sensor Detects Dangerous Substances
A material found in crab shells is part of a new sensor system. July 26, 2006

NIST and NanoCenter announce partnership
$1.5 million grant will support creation of new nanotechnologies. July 11, 2006

NanoCenter featured on PBS's Nightly Business Report
Segment is titled "The Science and Business of Nanotechnology" November 3, 2005

University of Maryland ranked No. 1 in nano research and education
Trade publication Small Times cites many factors in ratings May 1, 2005

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910
December 2004—Trio invented 'Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation.' December 7, 2004

W.M. Keck Foundation award establishes new nano lab
Lab funded by Los Angeles foundation will be centerpiece for combinatorial nanosynthesis and multiscale characterization. September 15, 2004

W.M. Keck Foundation gives award to M-CINSE, University of Maryland
$750,000 award will establish the Keck Laboratory for Combinatorial Nanosynthesis and Multiscale Characterization. September 7, 2004

Rubloff leads new M-CINSE nanotech center
Sept 2004—Former ISR director to help the university contribute to cutting-edge nanoscience September 2, 2004

Rubloff, Takeuchi are co-PIs for NSF International Materials Institute
Five-year, $3.5 million grant focuses on combinatorial sciences and materials informatics. June 15, 2004

Soon Cho awarded Outstanding Paper Award
Ph.D. student's research "Real-Time, In-Situ Metrology to Drive Real-Time Advanced Process Control." October 14, 2003

Rubloff, Takeuchi are PIs for new NSF international materials institute
CoSMIC to develop tools for high-speed discovery and evolution of new materials and processes March 4, 2003

Adomaitis and Rubloff win NSF ITR grant
Research to develop a new paradigm for semiconductor manufacturing equipment. August 3, 2002

Ghodssi, Rubloff, Smela awarded DURIP for chemical mechanical planarizer
Tool used in semiconductor fabrication, microelectronics, optoelectronics and MEMS April 5, 2002

Baras, Berenstein, Ephremides, Liu and Papadopoulos win DoD URI
Research to focus on distributed immune systems for wireless networks information assurance March 29, 2001

DeVoe wins DURIP for deep reactive ion etcher
Equipment will be critical component of ISR's MEMS fabrication and nanotechnology capacity February 17, 2001